2016 | Invited Paper: MBMW-101: World’s 1st High-Throughput Multi-Beam Mask Writer Publikationen 2016 | Invited Paper: MBMW-101: World’s 1st High-Throughput Multi-Beam Mask Writer
2015 | Investigation of local registration performance of IMS Nanofabrication’s Multi-Beam Mask Writer Publikationen 2015 | Investigation of local registration performance of IMS Nanofabrication’s Multi-Beam Mask Writer
2013 | Invited Paper: Performance of the Proof-of-Concept Multi-Beam Mask Writer (MBMW POC) Publikationen 2013 | Invited Paper: Performance of the Proof-of-Concept Multi-Beam Mask Writer (MBMW POC)
2013 | Electron multibeam technology for mask and wafer writing at 0.1 nm address grid Publikationen 2013 | Electron multibeam technology for mask and wafer writing at 0.1 nm address grid
