We have achieved the important and impressive milestone of reaching 500 team members! News We have achieved the important and impressive milestone of reaching 500 team members!
Congratulation to our excellent speakers within our IMS Knowledge Transfer! News Congratulation to our excellent speakers within our IMS Knowledge Transfer!
2016 | Invited Paper: MBMW-101: World’s 1st High-Throughput Multi-Beam Mask Writer Publikationen 2016 | Invited Paper: MBMW-101: World’s 1st High-Throughput Multi-Beam Mask Writer
2015 | Investigation of local registration performance of IMS Nanofabrication’s Multi-Beam Mask Writer Publikationen 2015 | Investigation of local registration performance of IMS Nanofabrication’s Multi-Beam Mask Writer
2013 | Invited Paper: Performance of the Proof-of-Concept Multi-Beam Mask Writer (MBMW POC) Publikationen 2013 | Invited Paper: Performance of the Proof-of-Concept Multi-Beam Mask Writer (MBMW POC)
2013 | Electron multibeam technology for mask and wafer writing at 0.1 nm address grid Publikationen 2013 | Electron multibeam technology for mask and wafer writing at 0.1 nm address grid